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Arul Ravichandran
Arul Ravichandran
Senior Process Engineer, ASM America
Verified email at asm.com
Title
Cited by
Cited by
Year
Sub-10 nm Tunable Hybrid Dielectric Engineering on MoS2 for Two-Dimensional Material-Based Devices
L Cheng, J Lee, H Zhu, AV Ravichandran, Q Wang, AT Lucero, MJ Kim, ...
ACS nano 11 (10), 10243-10252, 2017
462017
Atomic layer deposition of layered boron nitride for large-area 2D electronics
J Lee, AV Ravichandran, J Mohan, L Cheng, AT Lucero, H Zhu, Z Che, ...
ACS applied materials & interfaces 12 (32), 36688-36694, 2020
252020
Low temperature thermal atomic layer deposition of aluminum nitride using hydrazine as the nitrogen source
YC Jung, SM Hwang, DN Le, ALN Kondusamy, J Mohan, SW Kim, JH Kim, ...
Materials 13 (15), 3387, 2020
182020
Robust SiNx/GaN MIS-HEMTs With Crystalline Interfacial Layer Using Hollow Cathode PEALD
X Meng, J Lee, A Ravichandran, YC Byun, JG Lee, AT Lucero, SJ Kim, ...
IEEE Electron Device Letters 39 (8), 1195-1198, 2018
132018
Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiNx Films Using Trichlorodisilane for Etch-Resistant Coatings
SM Hwang, HS Kim, DN Le, AV Ravichandran, A Sahota, J Lee, YC Jung, ...
ACS Applied Nano Materials 4 (3), 2558-2564, 2021
112021
High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor
HS Kim, SM Hwang, X Meng, YC Byun, YC Jung, AV Ravichandran, ...
Journal of Materials Chemistry C 8 (37), 13033-13039, 2020
102020
Ozone based high-temperature atomic layer deposition of SiO2 thin films
SM Hwang, Z Qin, HS Kim, A Ravichandran, YC Jung, SJ Kim, J Ahn, ...
Japanese Journal of Applied Physics 59 (SI), SIIG05, 2020
62020
Ambipolar gate modulation technique for the reduction of offset and flicker noise in graphene Hall-effect sensors
A Polley, AV Ravichandran, VS Kumar, A Venugopal, L Cheng, AT Lucero, ...
IEEE Sensors Journal 21 (22), 25675-25686, 2021
22021
Wafer Scale Graphene Field Effect Transistors on Thin Thermal Oxide
AV Ravichandran, J Lee, L Cheng, AT Lucero, CD Young, L Colombo, ...
ECS Transactions 86 (2), 51, 2018
12018
Methods and systems for filling gap features on substrate surfaces
Y Cabrera, YC Byun, AV Ravichandran, S Luiso, SH Yu, MB Mousa
US Patent App. 18/119,884, 2023
2023
Systems and methods for cleaning and treating a surface of a substrate
YC Byun, MB Mousa, D Li, AV Ravichandran, Y Cabrera, S Luiso
US Patent App. 18/147,038, 2023
2023
Metal-on-metal deposition methods for filling a gap feature on a substrate surface
S Luiso, YC Byun, H Saare, LEE Jaebeom, S Datta, J Kim, P Raisanen, ...
US Patent App. 18/148,687, 2023
2023
Metal-on-metal deposition methods for filling a gap feature on a substrate surface
J Kim, YC Byun, P Raisanen, D Li, EJ Shero, Y Cabrera, ...
US Patent App. 17/989,760, 2023
2023
Graphene Mobility Dependence on the Resistivity of Si Wafer
A Ravichandran, L Cheng, AT Lucero, J Lee, CD Young, A Venugopal, ...
Electrochemical Society Meeting Abstracts prime2020, 3550-3550, 2020
2020
Evaluation and Integration of Graphene Field Effect Devices
AV Ravichandran
The University of Texas at Dallas, 2020
2020
The Graphene Field Effect Transistor: A Large Scale Integration Approach
AV Ravichandran
2016
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