Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley journal of microelectromechanical systems 27 (2), 296-304, 2018 | 59 | 2018 |
Airborne piezoelectric micromachined ultrasonic transducers for long-range detection GL Luo, Y Kusano, DA Horsley journal of microelectromechanical systems 30 (1), 81-89, 2020 | 49 | 2020 |
High-SPL air-coupled piezoelectric micromachined ultrasonic transducers based on 36% ScAlN thin-film Y Kusano, I Ishii, T Kamiya, A Teshigahara, GL Luo, DA Horsley IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019 | 48 | 2019 |
Monolithic piezoelectric aluminum nitride MEMS-CMOS microphone J Segovia-Fernandez, S Sonmezoglu, ST Block, Y Kusano, JM Tsai, ... 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 37 | 2017 |
36% scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers Y Kusano, GL Luo, D Horsley, I Taru Ishii, A Teshigahara 2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018 | 25 | 2018 |
Wideband air-coupled PZT piezoelectric micromachined ultrasonic transducer through DC bias tuning Y Kusano, Q Wang, RQ Rudy, RG Polcawich, DA Horsley 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 22 | 2017 |
High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates GL Luo, S Fung, Q Wang, Y Kusano, J Lasiter, D Kidwell, DA Horsley 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 20 | 2017 |
High-pressure output 40 kHz air-coupled piezoelectric micromachined ultrasonic transducers GL Luo, Y Kusano, MN Roberto, DA Horsley 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019 | 18 | 2019 |
Immersion PMUTs fabricated with a low thermal-budget surface micromachining process GL Luo, Y Kusano, D Horsley 2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018 | 15 | 2018 |
Frequency selective MEMS microphone based on a bioinspired spiral-shaped acoustic resonator Y Kusano, J Segovia-Fernandez, S Sonmezoglu, R Amirtharajah, ... 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 15 | 2017 |
Increased output-pressure PMUTs with a sloped profile fabricated via surface micromachining GL Luo, Q Wang, Y Kusano, D Horsley 2018 IEEE International Frequency Control Symposium (IFCS), 1-4, 2018 | 13 | 2018 |
Coupled piezoelectric micromachined ultrasonic transducers with improved pulse-echo performance Q Wang, Y Kusano, DA Horsley 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 13 | 2017 |
Low thermal budget surface micromachining process for piezoelectric micromachined ultrasonic transducer arrays with in-situ vacuum sealed cavities Q Wang, G Luo, Y Kusano, DA Horsley Proceedings of the Hilton Head Workshop, 2018 | 12 | 2018 |
Passive signal amplification via series-piezoelectric read-out S Sonmezoglu, J Segovia-Fernandez, ST Block, Y Kusano, JM Tsai, ... 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 4 | 2017 |
Spurious mode free hexagonal PMUT array Y Kusano, GL Luo, DA Horsley 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 2 | 2019 |
Electron spin resonance study of surface and oxide interface spin-triplet centers on (100) silicon wafers H Saito, S Hayashi, Y Kusano, KM Itoh, MP Vlasenko, LS Vlasenko Journal of Applied Physics 123 (16), 2018 | 2 | 2018 |
Ultrasonic sensor array Y Kusano, Y Lu, JL Strohmann, HV Panchawagh US Patent 11,438,703, 2022 | 1 | 2022 |
Low symmetry configurations of vacancy-oxygen complexes in irradiated silicon Y Kusano, H Saito, LS Vlasenko, MP Vlasenko, E Ohta, KM Itoh Journal of Applied Physics 118 (24), 2015 | 1 | 2015 |
Large Amplitude Piezoelectric Micromachined Ultrasonic Transducers for Airborne Applications Y Kusano University of California, Davis, 2019 | | 2019 |