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Matthew A Hopcroft
Matthew A Hopcroft
George Washington, Cambridge, Stanford, Berkeley, Hewlett-Packard
Verified email at mems.stanford.edu
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Cited by
Year
What is the Young's Modulus of Silicon?
MA Hopcroft, WD Nix, TW Kenny
Journal of microelectromechanical systems 19 (2), 229-238, 2010
20562010
Temperature dependence of quality factor in MEMS resonators
B Kim, MA Hopcroft, RN Candler, CM Jha, M Agarwal, R Melamud, ...
Journal of Microelectromechanical systems 17 (3), 755-766, 2008
3022008
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators
RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ...
Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006
2352006
Temperature-compensated aluminum nitride Lamb wave resonators
CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 57 …, 2010
1832010
Temperature-insensitive composite micromechanical resonators
R Melamud, SA Chandorkar, B Kim, HK Lee, JC Salvia, G Bahl, ...
Journal of Microelectromechanical Systems 18 (6), 1409-1419, 2009
1762009
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators
B Kim, RN Candler, MA Hopcroft, M Agarwal, WT Park, TW Kenny
Sensors and Actuators A: Physical 136 (1), 125-131, 2007
1762007
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams
RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ...
Journal of Microelectromechanical Systems 15 (4), 927-934, 2006
1622006
Micromechanical testing of SU‐8 cantilevers
M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, D Moore, J Brugger
Fatigue & Fracture of Engineering Materials & Structures 28 (8), 735-742, 2005
1612005
Micromechanical Testing of SU-8 Cantilevers
M Hopcroft, T Kramer, G Kim, K Takashima, Y Higo, DF Moore, J Brugger
Abstracts of ATEM: International Conference on Advanced Technology in …, 2003
1612003
Temperature-compensated high-stability silicon resonators
R Melamud, B Kim, SA Chandorkar, MA Hopcroft, M Agarwal, CM Jha, ...
Applied physics letters 90 (24), 244107, 2007
1432007
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano
Applied Physics Letters 97 (8), 083501, 2010
1282010
AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices
CM Lin, WC Lien, VV Felmetsger, MA Hopcroft, DG Senesky, AP Pisano
Applied Physics Letters 97 (14), 141907, 2010
912010
Thermal isolation of encapsulated MEMS resonators
CM Jha, MA Hopcroft, SA Chandorkar, JC Salvia, M Agarwal, RN Candler, ...
Journal of Microelectromechanical Systems 17 (1), 175-184, 2008
912008
Using the temperature dependence of resonator quality factor as a thermometer
MA Hopcroft, B Kim, S Chandorkar, R Melamud, M Agarwal, CM Jha, ...
Applied Physics Letters 91 (1), 013505, 2007
872007
Effects of stress on the temperature coefficient of frequency in double clamped resonators
R Melamud, M Hopcroft, C Jha, B Kim, S Chandorkar, R Candler, ...
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
852005
Optimal drive condition for nonlinearity reduction in electrostatic microresonators
M Agarwal, SA Chandorkar, RN Candler, B Kim, MA Hopcroft, R Melamud, ...
Applied physics letters 89 (21), 214105, 2006
812006
Frequency stability of wafer-scale encapsulated MEMS resonators
B Kim, RN Candler, M Hopcroft, M Agarwal, WT Park, TW Kenny
The 13th International Conference on Solid-State Sensors, Actuators and …, 2005
702005
CMOS-compatible dual-resonator MEMS temperature sensor with milli-degree accuracy
CM Jha, G Bahl, R Melamud, SA Chandorkar, MA Hopcroft, B Kim, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
612007
Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators
M Agarwal, H Mehta, RN Candler, SA Chandorkar, B Kim, MA Hopcroft, ...
Journal of Applied Physics 102 (7), 074903, 2007
592007
Model and observations of dielectric charge in thermally oxidized silicon resonators
G Bahl, R Melamud, B Kim, SA Chandorkar, JC Salvia, MA Hopcroft, ...
Journal of Microelectromechanical Systems 19 (1), 162-174, 2009
562009
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