Mary Brake
Mary Brake
Unknown affiliation
Verified email at emich.edu
Title
Cited by
Cited by
Year
The gaseous electronics conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing …
PJ Hargis Jr, KE Greenberg, PA Miller, JB Gerardo, JR Torczynski, ...
Review of Scientific Instruments 65 (1), 140-154, 1994
4111994
Abel's inversion applied to experimental spectroscopic data with off axis peaks
MJ Buie, JTP Pender, JP Holloway, T Vincent, PLG Ventzek, ML Brake
Journal of Quantitative Spectroscopy and Radiative Transfer 55 (2), 231-243, 1996
701996
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part I. Experiment
M Brake, J Hinkle, J Asmussen, M Hawley, R Kerber
Plasma Chemistry and Plasma Processing 3 (1), 63-78, 1983
471983
A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor
JP Holloway, S Shannon, SM Sepke, ML Brake
Journal of Quantitative Spectroscopy and Radiative Transfer 68 (1), 101-115, 2001
422001
Multipactor experiment on a dielectric surface
RB Anderson, WD Getty, ML Brake, YY Lau, RM Gilgenbach, A Valfells
Review of Scientific Instruments 72 (7), 3095-3099, 2001
292001
Radial optical emission profiles of radio frequency glow discharges
J Pender, M Buie, T Vincent, J Holloway, M Elta, ML Brake
Journal of applied physics 74 (5), 3590-3592, 1993
221993
Microwave resonant-cavity-produced air discharges
ML Passow, ML Brake, P Lopez, WB McColl, TE Repetti
IEEE transactions on plasma science 19 (2), 219-228, 1991
211991
The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas
ML Brake, J Pender, J Fournier
Physics of Plasmas 6 (5), 2307-2313, 1999
181999
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part II. Theoretical calculations
ML Brake, RL Kerber
Plasma Chemistry and Plasma Processing 3 (1), 79-95, 1983
181983
A spatially resolved optical emission sensor for plasma etch monitoring
S Shannon, JP Holloway, K Flippo, ML Brake
Applied physics letters 71 (11), 1467-1468, 1997
171997
In situ diagnostic for etch uniformity
MJ Buie, JT Pender, J Soniker, ML Brake, M Elta
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (4 …, 1995
171995
Electron density and collision frequency of microwave‐resonant‐cavity‐produced discharges
W McColl, C Brooks, ML Brake
Journal of applied physics 74 (6), 3724-3735, 1993
161993
Radio-frequency plasma cleaning for mitigation of high-power microwave-pulse shortening in a coaxial gyrotron
WE Cohen, RM Gilgenbach, RL Jaynes, CW Peters, MR Lopez, YY Lau, ...
Applied Physics Letters 77 (23), 3725-3727, 2000
152000
Spatially resolved fluorine actinometry
S Shannon, JP Holloway, ML Brake
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999
151999
Reactive ion etching in the Gaseous Electronics Conference RF reference cell
ML Brake, JTP Pender, MJ Buie, A Ricci, J Soniker, PD Pochan, PA Miller
Journal of research of the National Institute of Standards and Technology …, 1995
131995
Spectroscopic study of anode plasmas in a microsecond electron beam diode
ME Cuneo, RM Gilgenbach, ML Brake
IEEE transactions on plasma science 15 (4), 375-383, 1987
111987
Temporally resolved spectroscopy of laser-induced carbon ablation plasmas
ML Brake, J Meachum, RM Gilgenbach, W Thornhill
IEEE transactions on plasma science 15 (1), 73-77, 1987
111987
Emission spectroscopy of long pulse relativistic electron‐beam‐produced argon plasmas
ML Brake, T Repetti, K Pearce, R Lucey
Journal of applied physics 60 (1), 99-103, 1986
111986
Double Langmuir probe diagnostic of a resonant cavity microwave discharge
W McColl, C Brooks, ML Brake
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (4 …, 1993
101993
Chamber material effects on actinometric measurements in rf glow discharges
TJ Cotler, ML Passow, JP Fournier, ML Brake, ME Elta
Journal of applied physics 69 (5), 2885-2888, 1991
101991
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Articles 1–20