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Mary Brake
Mary Brake
Unknown affiliation
Verified email at emich.edu
Title
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Cited by
Year
The gaseous electronics conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing …
PJ Hargis Jr, KE Greenberg, PA Miller, JB Gerardo, JR Torczynski, ...
Review of Scientific Instruments 65 (1), 140-154, 1994
4601994
Abel's inversion applied to experimental spectroscopic data with off axis peaks
MJ Buie, JTP Pender, JP Holloway, T Vincent, PLG Ventzek, ML Brake
Journal of Quantitative Spectroscopy and Radiative Transfer 55 (2), 231-243, 1996
771996
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part I. Experiment
M Brake, J Hinkle, J Asmussen, M Hawley, R Kerber
Plasma Chemistry and Plasma Processing 3, 63-78, 1983
501983
A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor
JP Holloway, S Shannon, SM Sepke, ML Brake
Journal of Quantitative Spectroscopy and Radiative Transfer 68 (1), 101-115, 2001
432001
Multipactor experiment on a dielectric surface
RB Anderson, WD Getty, ML Brake, YY Lau, RM Gilgenbach, A Valfells
Review of Scientific Instruments 72 (7), 3095-3099, 2001
422001
Radial optical emission profiles of radio frequency glow discharges
J Pender, M Buie, T Vincent, J Holloway, M Elta, ML Brake
Journal of applied physics 74 (5), 3590-3592, 1993
261993
Microwave resonant-cavity-produced air discharges
ML Passow, ML Brake, P Lopez, WB McColl, TE Repetti
IEEE transactions on plasma science 19 (2), 219-228, 1991
261991
Electron density and collision frequency of microwave‐resonant‐cavity‐produced discharges
W McColl, C Brooks, ML Brake
Journal of applied physics 74 (6), 3724-3735, 1993
221993
The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas
ML Brake, J Pender, J Fournier
Physics of Plasmas 6 (5), 2307-2313, 1999
211999
A spatially resolved optical emission sensor for plasma etch monitoring
S Shannon, JP Holloway, K Flippo, ML Brake
The American Institute of Physics, 1997
201997
Insitu diagnostic for etch uniformity
MJ Buie, JT Pender, J Soniker, ML Brake, M Elta
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (4 …, 1995
201995
Spatially resolved fluorine actinometry
S Shannon, JP Holloway, ML Brake
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999
161999
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part II. Theoretical calculations
ML Brake, RL Kerber
Plasma Chemistry and Plasma Processing 3, 79-95, 1983
161983
Radio-frequency plasma cleaning for mitigation of high-power microwave-pulse shortening in a coaxial gyrotron
WE Cohen, RM Gilgenbach, RL Jaynes, CW Peters, MR Lopez, YY Lau, ...
Applied Physics Letters 77 (23), 3725-3727, 2000
142000
Temporally resolved spectroscopy of laser-induced carbon ablation plasmas
ML Brake, J Meachum, RM Gilgenbach, W Thornhill
IEEE transactions on plasma science 15 (1), 73-77, 1987
141987
Reactive ion etching in the Gaseous Electronics Conference RF reference cell
ML Brake, JTP Pender, MJ Buie, A Ricci, J Soniker, PD Pochan, PA Miller
Journal of research of the National Institute of Standards and Technology …, 1995
131995
Emission spectroscopy of long pulse relativistic electron‐beam‐produced argon plasmas
ML Brake, T Repetti, K Pearce, R Lucey
Journal of applied physics 60 (1), 99-103, 1986
131986
Spectroscopic study of anode plasmas in a microsecond electron beam diode
ME Cuneo, RM Gilgenbach, ML Brake
IEEE transactions on plasma science 15 (4), 375-383, 1987
121987
Double Langmuir probe diagnostic of a resonant cavity microwave discharge
W McColl, C Brooks, ML Brake
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (4 …, 1993
111993
A theoretical and experimental investigation of long-pulse, electron-beam-produced rare gas plasmas
ML Brake, TE Repetti
IEEE transactions on plasma science 16 (5), 581-589, 1988
111988
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Articles 1–20