The gaseous electronics conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing … PJ Hargis Jr, KE Greenberg, PA Miller, JB Gerardo, JR Torczynski, ... Review of Scientific Instruments 65 (1), 140-154, 1994 | 460 | 1994 |
Abel's inversion applied to experimental spectroscopic data with off axis peaks MJ Buie, JTP Pender, JP Holloway, T Vincent, PLG Ventzek, ML Brake Journal of Quantitative Spectroscopy and Radiative Transfer 55 (2), 231-243, 1996 | 77 | 1996 |
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part I. Experiment M Brake, J Hinkle, J Asmussen, M Hawley, R Kerber Plasma Chemistry and Plasma Processing 3, 63-78, 1983 | 50 | 1983 |
A reconstruction algorithm for a spatially resolved plasma optical emission spectroscopy sensor JP Holloway, S Shannon, SM Sepke, ML Brake Journal of Quantitative Spectroscopy and Radiative Transfer 68 (1), 101-115, 2001 | 43 | 2001 |
Multipactor experiment on a dielectric surface RB Anderson, WD Getty, ML Brake, YY Lau, RM Gilgenbach, A Valfells Review of Scientific Instruments 72 (7), 3095-3099, 2001 | 42 | 2001 |
Radial optical emission profiles of radio frequency glow discharges J Pender, M Buie, T Vincent, J Holloway, M Elta, ML Brake Journal of applied physics 74 (5), 3590-3592, 1993 | 26 | 1993 |
Microwave resonant-cavity-produced air discharges ML Passow, ML Brake, P Lopez, WB McColl, TE Repetti IEEE transactions on plasma science 19 (2), 219-228, 1991 | 26 | 1991 |
Electron density and collision frequency of microwave‐resonant‐cavity‐produced discharges W McColl, C Brooks, ML Brake Journal of applied physics 74 (6), 3724-3735, 1993 | 22 | 1993 |
The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas ML Brake, J Pender, J Fournier Physics of Plasmas 6 (5), 2307-2313, 1999 | 21 | 1999 |
A spatially resolved optical emission sensor for plasma etch monitoring S Shannon, JP Holloway, K Flippo, ML Brake The American Institute of Physics, 1997 | 20 | 1997 |
In situ diagnostic for etch uniformity MJ Buie, JT Pender, J Soniker, ML Brake, M Elta Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13 (4 …, 1995 | 20 | 1995 |
Spatially resolved fluorine actinometry S Shannon, JP Holloway, ML Brake Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999 | 16 | 1999 |
Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part II. Theoretical calculations ML Brake, RL Kerber Plasma Chemistry and Plasma Processing 3, 79-95, 1983 | 16 | 1983 |
Radio-frequency plasma cleaning for mitigation of high-power microwave-pulse shortening in a coaxial gyrotron WE Cohen, RM Gilgenbach, RL Jaynes, CW Peters, MR Lopez, YY Lau, ... Applied Physics Letters 77 (23), 3725-3727, 2000 | 14 | 2000 |
Temporally resolved spectroscopy of laser-induced carbon ablation plasmas ML Brake, J Meachum, RM Gilgenbach, W Thornhill IEEE transactions on plasma science 15 (1), 73-77, 1987 | 14 | 1987 |
Reactive ion etching in the Gaseous Electronics Conference RF reference cell ML Brake, JTP Pender, MJ Buie, A Ricci, J Soniker, PD Pochan, PA Miller Journal of research of the National Institute of Standards and Technology …, 1995 | 13 | 1995 |
Emission spectroscopy of long pulse relativistic electron‐beam‐produced argon plasmas ML Brake, T Repetti, K Pearce, R Lucey Journal of applied physics 60 (1), 99-103, 1986 | 13 | 1986 |
Spectroscopic study of anode plasmas in a microsecond electron beam diode ME Cuneo, RM Gilgenbach, ML Brake IEEE transactions on plasma science 15 (4), 375-383, 1987 | 12 | 1987 |
Double Langmuir probe diagnostic of a resonant cavity microwave discharge W McColl, C Brooks, ML Brake Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (4 …, 1993 | 11 | 1993 |
A theoretical and experimental investigation of long-pulse, electron-beam-produced rare gas plasmas ML Brake, TE Repetti IEEE transactions on plasma science 16 (5), 581-589, 1988 | 11 | 1988 |