| Resistless nanofabrication by stencil lithography: A review O Vazquez-Mena, L Gross, S Xie, LG Villanueva, J Brugger Microelectronic Engineering 132, 236-254, 2015 | 111 | 2015 |
| Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ... Microelectronic Engineering 86 (4-6), 1238-1242, 2009 | 51 | 2009 |
| A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application SQ Xie, J Wan, BR Lu, Y Sun, Y Chen, XP Qu, R Liu Microelectronic Engineering 85 (5-6), 914-917, 2008 | 32 | 2008 |
| Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8 R Yang, BR Lu, J Wan, SQ Xie, Y Chen, E Huq, XP Qu, R Liu Microelectronic Engineering 86 (4-6), 1379-1381, 2009 | 28 | 2009 |
| Electro-mechanical sensing in freestanding monolayered gold nanoparticle membranes M Gauvin, J Grisolia, T Alnasser, B Viallet, S Xie, J Brugger, L Ressier Nanoscale 8 (22), 11363-11370, 2016 | 21 | 2016 |
| Plasmonic photo-current in freestanding monolayered gold nanoparticle membranes M Gauvin, T Alnasser, E Terver, I Abid, A Mlayah, S Xie, J Brugger, ... Nanoscale 8 (36), 16162-16167, 2016 | 15 | 2016 |
| 100 mm dynamic stencils pattern sub-micrometre structures V Savu, S Xie, J Brugger Nanoscale 3 (7), 2739-2742, 2011 | 11 | 2011 |
| Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials Y Chen, Y Zhou, G Pan, E Huq, BR Lu, SQ Xie, J Wan, Z Shu, XP Qu, ... Microelectronic engineering 85 (5-6), 1147-1151, 2008 | 11 | 2008 |
| Optical nanostructures fabricated by SU-8 based nanoimprint lithography R Liu, BR Lu, SQ Xie, J Wan, Z Shu, XP Qu, Y Chen J. Korean Phys. Soc 55 (3), 1290-1294, 2009 | 10 | 2009 |
| Vertically-stacked gate-all-around polysilicon nanowire FETs with sub-μm gates patterned by nanostencil lithography D Sacchetto, S Xie, V Savu, M Zervas, G De Micheli, J Brugger, ... Microelectronic engineering 98, 355-358, 2012 | 9 | 2012 |
| Robust PECVD SiC membrane made for stencil lithography S Xie, V Savu, W Tang, O Vazquez-Mena, K Sidler, H Zhang, J Brugger Microelectronic engineering 88 (8), 2790-2793, 2011 | 9 | 2011 |
| Nanophotonic crystals with chiral elements by a hot embossing process in SU-8 BR Lu, J Wan, SQ Xie, Z Shu, Y Sun, Y Chen, XP Qu, R Liu Microelectronic engineering 85 (5-6), 866-869, 2008 | 9 | 2008 |
| Arrays of pentacene single crystals by stencil evaporation P Fesenko, V Flauraud, S Xie, J Brugger, J Genoe, P Heremans, C Rolin Crystal Growth & Design 16 (8), 4694-4700, 2016 | 7 | 2016 |
| Duplication of nanoimprint templates by a novel SU-8//PMMA trilayer technique J Wan, Z Shu, SR Deng, SQ Xie, BR Lu, R Liu, Y Chen, XP Qu Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009 | 7 | 2009 |
| Metallic and dielectric photonic crystals with chiral elements by combined nanoimprint and reversal lithography in SU-8 BR Lu, J Wan, Z Shu, SQ Xie, Y Chen, E Huq, XP Qu, R Liu Microelectronic engineering 86 (4-6), 619-621, 2009 | 6 | 2009 |
| Applications of nanoimprint lithography for biochemical and nanophotonic structures using SU-8 B Lu, SQ Xie, J Wan, R Yang, Z Shu, XP Qu, R Liu, Y Chen, E Huq International Journal of Nanoscience 8 (01n02), 151-155, 2009 | 6 | 2009 |
| Effects of tensile stress on electrical parameters of thin film conductive wires fabricated on a flexible substrate using stencil lithography M Frantlović, I Jokić, V Savu, S Xie, J Brugger Microelectronic engineering 98, 230-233, 2012 | 5 | 2012 |
| Fabrication of 150 nm half-pitch grating templates for nanoimprint lithography SQ Xie, BR Lu, Y Sun, Y Chen, XP Qu, R Liu Journal of Nanoscience and Nanotechnology 9 (2), 1437-1440, 2009 | 4 | 2009 |
| Growth of organic semiconductor thin films with multi-micron domain size and fabrication of organic transistors using a stencil nanosieve P Fesenko, V Flauraud, S Xie, E Kang, T Uemura, J Brugger, J Genoe, ... ACS applied materials & interfaces 9 (28), 23314-23318, 2017 | 3 | 2017 |
| In-situ actuated gap reduction and clogging-free apertures for quasi-dynamic stencil lithography S Xie, AV Savu, J Brugger The 7th Annual IEEE International Conference on Nano/Micro Engineered and …, 2012 | 3 | 2012 |
Juergen BruggerProfessor of Microengineering (EPFL)Verified email at epfl.ch
