| Design and fabrication of integrated magnetic MEMS energy harvester for low frequency applications M Han, Q Yuan, X Sun, H Zhang Journal of Microelectromechanical Systems 23 (1), 204-212, 2013 | 100 | 2013 |
| Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators X Sun, Q Yuan, D Fang, H Zhang Sensors and Actuators A: Physical 188, 190-197, 2012 | 23 | 2012 |
| Electrodeposition and characterization of CoNiMnP-based permanent magnetic film for MEMS applications XM Sun, Q Yuan, DM Fang, HX Zhang 2011 6th IEEE International Conference on Nano/Micro Engineered and …, 2011 | 18 | 2011 |
| Frequency stability of RF-MEMS disk resonators Q Yuan, W Luo, H Zhao, B Peng, J Yang, F Yang IEEE Transactions on Electron Devices 62 (5), 1603-1608, 2015 | 16 | 2015 |
| Design, simulation, and characterization of variable inductor with electrostatic actuation fabricated by using surface micromachining technology DM Fang, XH Li, Q Yuan, HX Zhang IEEE transactions on electron devices 57 (10), 2751-2755, 2010 | 16 | 2010 |
| A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators J Zhao, Q Yuan, X Kan, J Yang, F Yang Journal of Micromechanics and Microengineering 27 (1), 014003, 2016 | 14 | 2016 |
| Design and microfabrication of integrated magnetic MEMS energy harvester for low frequency application Q Yuan, X Sun, DM Fang, H Zhang 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 12 | 2011 |
| High performance MEMS spiral inductors DM Fang, Q Yuan, XH Li, HX Zhang, Y Zhou, XL Zhao 2010 IEEE 5th International Conference on Nano/Micro Engineered and …, 2010 | 12 | 2010 |
| Electrostatically driven tunable radio frequency inductor DM Fang, Q Yuan, XH Li, HX Zhang Microsystem technologies 16, 2119-2122, 2010 | 11 | 2010 |
| Magnetic energy coupling system based on micro-electro-mechanical system coils X Li, Q Yuan, T Yang, J Liu, H Zhang Journal of Applied Physics 111 (7), 2012 | 6 | 2012 |
| Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system X Sun, Y Zheng, Z Li, M Yu, Q Yuan, X Li, H Zhang 2012 7th IEEE International Conference on Nano/Micro Engineered and …, 2012 | 4 | 2012 |
| Spiral capacitor based on copper electroplating Y Chen, X Li, D Fang, Q Yuan, H Zhang 2009 4th IEEE International Conference on Nano/Micro Engineered and …, 2009 | 3 | 2009 |
| Electrodeposition of CoNiMnP-based permanent magnetic film Q Yuan, DM Fang, X Li, HX Zhang 2010 IEEE 5th International Conference on Nano/Micro Engineered and …, 2010 | 2 | 2010 |
| Study of RF power attenuation with MEMS coils D Li, X Li, S Chen, Q Yuan, H Zhang 2008 3rd IEEE International Conference on Nano/Micro Engineered and …, 2008 | 2 | 2008 |
