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Jun-Chieh Wang
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Etching with atomic precision by using low electron temperature plasma
L Dorf, JC Wang, S Rauf, GA Monroy, Y Zhang, A Agarwal, J Kenney, ...
J. Phys. D: Appl. Phys. 50, 274003, 2017
342017
Electron current extraction from radio frequency excited micro-dielectric barrier discharges
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
Journal of Applied Physics 113 (3), 2013
212013
Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation
JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze
Plasma Sources Science and Technology 30 (7), 075031, 2021
142021
Charging of moving surfaces by corona discharges sustained in air
JC Wang, D Zhang, N Leoni, H Birecki, O Gila, MJ Kushner
Journal of Applied Physics 116 (4), 2014
142014
A microdischarge-based monolithic pressure sensor
CK Eun, X Luo, JC Wang, Z Xiong, M Kushner, Y Gianchandani
Journal of Microelectromechanical Systems 23 (6), 1300-1310, 2014
112014
Characteristics of a radio-frequency micro-dielectric barrier discharge array
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
Plasma Sources Science and Technology 22 (2), 025015, 2013
102013
Atomic precision etch using a low-electron temperature plasma
L Dorf, JC Wang, S Rauf, Y Zhang, A Agarwal, J Kenney, K Ramaswamy, ...
Advanced Etch Technology for Nanopatterning V 9782, 30-37, 2016
72016
A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas
JC Wang, W Tian, S Rauf, S Sadighi, J Kenney, P Stout, VS Vidyarthi, ...
Plasma Sources Science and Technology 27 (9), 094003, 2018
62018
Relativistic electromagnetic ion cyclotron instabilities
KR Chen, RD Huang, JC Wang, YY Chen
physical Review E 71 (3), 036410, 2005
62005
Modeling Studies of Atmospheric Pressure Microplasmas: Plasma Dynamics, Surface Interaction and Applications.
JC Wang
22014
Microdischarge-based transducer
Y Gianchandani, EUN Christine, X Luo, M Kushner, Z Xiong, W Jun-Chieh
US Patent 10,006,823, 2018
12018
Modeling of micro-dielectric barrier discharges
JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila, E Hanson
2010 Abstracts IEEE International Conference on Plasma Science, 1-1, 2010
12010
Particle-in-cell simulation of multi-frequency low-pressure capacitively-coupled plasma
JC Wang, P Tian, J Kenney, S Rauf, I Korolov, J Schulze
APS Annual Gaseous Electronics Meeting Abstracts, KT2. 005, 2020
2020
Particle-in-cell simulation of multi-frequency capacitively-coupled plasmas at low pressure: a 2D perspective
P Tian, JC Wang, J Kenney, S Rauf, J Schulze, I Korolov
APS Annual Gaseous Electronics Meeting Abstracts, LT2. 034, 2020
2020
Developing Accurate Capacitively Coupled Plasma Models
S Rauf, JC Wang, W Tian, J Kenney
APS Annual Gaseous Electronics Meeting Abstracts, ET1. 003, 2018
2018
Modeling of industrial plasma tools and applications: experimental validation
S Rauf, S Sadighi, A Balakrishna, K Bera, J Kenney, W Tian, JC Wang
Bulletin of the American Physical Society 62, 2017
2017
Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime
JC Wang, J Kenney, A Agarwal, M Nichols, J Rogers, S Rauf
APS Annual Gaseous Electronics Meeting Abstracts, FT2. 004, 2015
2015
Glow-like atmospheric pressure micro-discharges produced by charge rollers
JC Wang, MJ Kushner, S Chang, N Leoni, H Birecki, M Lee, T Anthony, ...
2013 Abstracts IEEE International Conference on Plasma Science (ICOPS), 1-1, 2013
2013
Micro-Plasma Discharges From Charge Rollers in Print Engines
JC Wang, N Leoni, H Birecki, O Gila, MJ Kushner
APS Meeting Abstracts 1, 2012
2012
Charging of Surfaces with a Wire Corona Discharge: Simulations of Plasma Hydrodynamics with Moving Surfaces
JC Wang, MJ Kushner, N Leoni, H Birecki, O Gila
NIP & Digital Fabrication Conference 28, 490-493, 2012
2012
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Articles 1–20