| Thin film analysis by X-ray scattering M Birkholz, PF Fewster, C Genzel Wiley-VCH, 2006 | 1832 | 2006 |
| Sulfur deficiency in iron pyrite (FeS 2− x) and its consequences for band-structure models M Birkholz, S Fiechter, A Hartmann, H Tributsch Physical Review B 43 (14), 11926, 1991 | 239 | 1991 |
| Photoactive thin film semiconducting iron pyrite prepared by sulfurization of iron oxides G Smestad, A Ennaoui, S Fiechter, H Tributsch, WK Hofmann, M Birkholz, ... Solar Energy Materials 20 (3), 149-165, 1990 | 206 | 1990 |
| Ultrafast carrier trapping in microcrystalline silicon observed in optical pump–terahertz probe measurements P Uhd Jepsen, W Schairer, IH Libon, U Lemmer, NE Hecker, M Birkholz, ... Applied Physics Letters 79 (9), 1291-1293, 2001 | 145 | 2001 |
| Formation of semiconducting iron pyrite by spray pyrolysis G Smestad, A Da Silva, H Tributsch, S Fiechter, M Kunst, N Meziani, ... Solar Energy Materials 18 (5), 299-313, 1989 | 123 | 1989 |
| Sputtering of thin pyrite films M Birkholz, D Lichtenberger, C Höpfner, S Fiechter Solar Energy Materials and Solar Cells 27 (3), 243-251, 1992 | 88 | 1992 |
| Structure-function relationship between preferred orientation of crystallites and electrical resistivity in thin polycrystalline ZnO: Al films M Birkholz, B Selle, F Fenske, W Fuhs Physical Review B 68 (20), 205414, 2003 | 87 | 2003 |
| The microstructure and stoichiometry of pyrite FeS2−x S Fiechter, M Birkholz, A Hartmann, P Dulski, M Giersig, H Tributsch, ... Journal of materials research 7, 1829-1838, 1992 | 73 | 1992 |
| Evolution of structure in thin microcrystalline silicon films grown by electron-cyclotron resonance chemical vapor deposition M Birkholz, B Selle, E Conrad, K Lips, W Fuhs Journal of Applied Physics 88 (7), 4376-4379, 2000 | 71 | 2000 |
| Nanocomposite layers of ceramic oxides and metals prepared by reactive gas-flow sputtering M Birkholz, U Albers, T Jung Surface and Coatings Technology 179 (2-3), 279-285, 2004 | 69 | 2004 |
| BEOL embedded RF-MEMS switch for mm-wave applications M Kaynak, KE Ehwald, J Drews, R Scholz, F Korndörfer, D Knoll, B Tillack, ... 2009 IEEE International Electron Devices Meeting (IEDM), 1-4, 2009 | 62 | 2009 |
| Ultrathin TiN membranes as a technology platform for CMOS‐integrated MEMS and BioMEMS devices M Birkholz, KE Ehwald, P Kulse, J Drews, M Fröhlich, U Haak, M Kaynak, ... Advanced Functional Materials 21 (9), 1652-1656, 2011 | 59 | 2011 |
| Corrosion-resistant metal layers from a CMOS process for bioelectronic applications M Birkholz, KE Ehwald, D Wolansky, I Costina, C Baristiran-Kaynak, ... Surface and Coatings Technology 204 (12-13), 2055-2059, 2010 | 59 | 2010 |
| Amorphous-crystalline phase transition during the growth of thin films: The case of microcrystalline silicon M Birkholz, B Selle, W Fuhs, S Christiansen, HP Strunk, R Reich Physical Review B 64 (8), 085402, 2001 | 51 | 2001 |
| Crystal-field induced dipoles in heteropolar crystals II: Physical significance M Birkholz Zeitschrift für Physik B Condensed Matter 96, 333-340, 1995 | 51 | 1995 |
| X-ray diffraction study on residual stress and preferred orientation in thin titanium films subjected to a high ion flux during deposition M Birkholz, C Genzel, T Jung Journal of Applied Physics 96 (12), 7202-7211, 2004 | 50 | 2004 |
| Spiral microfluidic devices for cell separation and sorting in bioprocesses N Herrmann, P Neubauer, M Birkholz Biomicrofluidics 13 (6), 2019 | 43 | 2019 |
| Self-organized pattern formation of biomolecules at silicon surfaces: Intended application of a dislocation network M Kittler, X Yu, OF Vyvenko, M Birkholz, W Seifert, M Reiche, T Wilhelm, ... Materials Science and Engineering: C 26 (5-7), 902-910, 2006 | 35 | 2006 |
| Technology modules from micro‐and nano‐electronics for the life sciences M Birkholz, A Mai, C Wenger, C Meliani, R Scholz Wiley Interdisciplinary Reviews: Nanomedicine and Nanobiotechnology 8 (3 …, 2016 | 31 | 2016 |
| Low-temperature electron-paramagnetic-resonance study of extrinsic and intrinsic defects in CuGaSe 2 M Birkholz, P Kanschat, T Weiss, M Czerwensky, K Lips Physical Review B 59 (19), 12268, 1999 | 30 | 1999 |
Peter NeubauerTU Berlin, Bioprocess EngineeringVerified email at tu-berlin.de
