De-Qi Wen (Deqi Wen)
Title
Cited by
Cited by
Year
Heating mode transition in capacitively coupled CF4 discharges: comparison of experiments with simulations
GH Liu, YX Liu, DQ Wen, YN Wang
Plasma Sources Science and Technology 24 (3), 034006, 2015
302015
Experimental diagnostics of plasma radial uniformity and comparisons with computational simulations in capacitive discharges
YX Liu, YS Liang, DQ Wen, ZH Bi, YN Wang
Plasma Sources Science and Technology 24 (2), 025013, 2015
202015
Characterization of O2/Ar inductively coupled plasma studied by using a Langmuir probe and global model
W Liu, DQ Wen, SX Zhao, F Gao, YN Wang
Plasma Sources Science and Technology 24 (2), 025035, 2015
192015
Nonlinear series resonance and standing waves in dual-frequency capacitive discharges
DQ Wen, E Kawamura, MA Lieberman, AJ Lichtenberg, YN Wang
Plasma Sources Science and Technology 26 (1), 015007, 2016
162016
Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance-Enhanced Harmonics in Capacitive Discharges
K Zhao, DQ Wen, YX Liu, MA Lieberman, DJ Economou, YN Wang
Physical review letters 122 (18), 185002, 2019
112019
Suppression of single-surface multipactor discharges due to non-sinusoidal transverse electric field
DQ Wen, A Iqbal, P Zhang, JP Verboncoeur
Physics of Plasmas 26 (9), 093503, 2019
102019
A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
DQ Wen, E Kawamura, MA Lieberman, AJ Lichtenberg, YN Wang
Physics of Plasmas 24 (8), 083517, 2017
102017
Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges
L Wang, DQ Wen, QZ Zhang, YH Song, YR Zhang, YN Wang
Plasma Sources Science and Technology 28 (5), 055007, 2019
92019
Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source
K Zhao, YX Liu, E Kawamura, DQ Wen, MA Lieberman, YN Wang
Plasma Sources Science and Technology 27 (5), 055017, 2018
92018
Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges
E Kawamura, DQ Wen, MA Lieberman, AJ Lichtenberg
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (5 …, 2017
92017
Experimental and numerical investigations on time-resolved characteristics of pulsed inductively coupled O2/Ar plasmas
C Xue, DQ Wen, W Liu, YR Zhang, F Gao, YN Wang
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (2 …, 2017
92017
A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon
DQ Wen, W Liu, F Gao, MA Lieberman, YN Wang
Plasma Sources Science and Technology 25 (4), 045009, 2016
92016
F-atom kinetics in SF6/Ar inductively coupled plasmas
W Yang, SX Zhao, DQ Wen, W Liu, YX Liu, XC Li, YN Wang
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 34 (3 …, 2016
92016
Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O2 Discharges by Using a Hybrid Model
DQ Wen, YR Zhang, MA Lieberman, YN Wang
Plasma Processes and Polymers 14 (4-5), 1600100, 2017
82017
Phase modulation in pulsed dual-frequency capacitively coupled plasmas
DQ Wen, QZ Zhang, W Jiang, YH Song, A Bogaerts, YN Wang
Journal of Applied Physics 115 (23), 233303, 2014
82014
Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges
J Liu, DQ Wen, YX Liu, F Gao, WQ Lu, YN Wang
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 31 (6 …, 2013
82013
Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O inductively coupled plasma
C Xue, F Gao, DQ Wen, YN Wang
Journal of Applied Physics 125 (2), 023303, 2019
72019
High-energy ballistic electrons in low-pressure radio-frequency plasmas
Y Fu, B Zheng, DQ Wen, P Zhang, QH Fan, JP Verboncoeur
Plasma Sources Science and Technology 29 (9), 09LT01, 2020
62020
The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials
JY Sun, DQ Wen, QZ Zhang, YX Liu, YN Wang
Physics of Plasmas 26 (6), 063505, 2019
62019
Investigation of the power transfer efficiency in a radio-frequency driven negative hydrogen ion source
H Li, F Gao, DQ Wen, W Yang, PC Du, YN Wang
Journal of Applied Physics 125 (17), 173303, 2019
52019
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Articles 1–20