Follow
Jin-Hyun Kim
Title
Cited by
Cited by
Year
Low-thermal-budget (300° C) ferroelectric TiN/Hf0. 5Zr0. 5O2/TiN capacitors realized using high-pressure annealing
SJ Kim, YC Jung, J Mohan, HJ Kim, SM Rho, MS Kim, JG Yoo, HR Park, ...
Applied Physics Letters 119 (24), 2021
192021
Low temperature thermal atomic layer deposition of aluminum nitride using hydrazine as the nitrogen source
YC Jung, SM Hwang, DN Le, ALN Kondusamy, J Mohan, SW Kim, JH Kim, ...
Materials 13 (15), 3387, 2020
182020
Application of single-pulse charge pumping method on evaluation of indium gallium zinc oxide thin-film transistors
MC Nguyen, AHT Nguyen, H Ji, J Cheon, JH Kim, KM Yu, SY Cho, ...
IEEE Transactions on Electron Devices 65 (9), 3786-3790, 2018
162018
Electrical characterization of the self-heating effect in oxide semiconductor thin-film transistors using pulse-based measurements
MC Nguyen, N On, H Ji, AHT Nguyen, S Choi, J Cheon, KM Yu, SY Cho, ...
IEEE Transactions on Electron Devices 65 (6), 2492-2497, 2018
152018
Low-Temperature Fabrication of High Quality Gate Insulator in Metal–Oxide–Semiconductor Capacitor Using Laser Annealing
KM Yu, HM Ji, MC Nguyen, AHT Nguyen, SJ Choi, JG Cheon, JH Kim, ...
IEEE Electron Device Letters 40 (2), 167-170, 2019
112019
Solution-processed Rb-doped indium zinc oxide thin-film transistors
SW Kim, MC Nguyen, AHT Nguyen, SJ Choi, HM Ji, JG Cheon, KM Yu, ...
IEEE Electron Device Letters 39 (9), 1330-1333, 2018
82018
Robust low-temperature (350° C) ferroelectric Hf0. 5Zr0. 5O2 fabricated using anhydrous H2O2 as the ALD oxidant
YC Jung, JH Kim, H Hernandez-Arriaga, J Mohan, SM Hwang, DN Le, ...
Applied Physics Letters 121 (22), 2022
52022
Relaxation Induced by Imprint Phenomena in Low-Temperature (400 °C) Processed Hf0.5Zr0.5O2-Based Metal-Ferroelectric-Metal Capacitors
J Mohan, YC Jung, H Hernandez-Arriaga, JH Kim, T Onaya, A Sahota, ...
ACS Applied Electronic Materials 4 (4), 1405-1414, 2022
42022
Low-temperature dopant activation using nanosecond ultra-violet laser annealing for monolithic 3D integration
JH Kim, HM Ji, MC Nguyen, AHT Nguyen, SW Kim, JY Baek, J Kim, ...
Thin Solid Films 735, 138864, 2021
42021
A Novel Combinatorial Approach to the Ferroelectric Properties in HfxZr1−xO2 Deposited by Atomic Layer Deposition
YC Jung, J Mohan, SM Hwang, JH Kim, DN Le, A Sahota, N Kim, ...
physica status solidi (RRL)–Rapid Research Letters 15 (5), 2100053, 2021
32021
Silver-doped tin oxide for electrical property enhancement in p-type channel thin film transistor
AHT Nguyen, MC Nguyen, H Ji, J Cheon, K Yu, J Kim, S Kim, S Cho, ...
Journal of Vacuum Science & Technology B 36 (6), 2018
32018
Optimal Nitrogen Incorporation in Nickel Silicide for Thermally Stable Contact Formation
HM Ji, MC Nguyen, AHT Nguyen, J Cheon, JH Kim, KM Yu, SW Kim, ...
Journal of Nanoscience and Nanotechnology 19 (10), 6468-6472, 2019
22019
Deposition of Fine Linewidth Silver Layer using a Modified Laser-induced Forward Transfer Technique
J Cheon, MC Nguyen, AHT Nguyen, S Choi, HM Ji, SW Kim, KM Yu, ...
Journal of the Korean Physical Society 73, 1279-1282, 2018
22018
Toward Low-Thermal-Budget Hafnia-Based Ferroelectrics via Atomic Layer Deposition
JH Kim, T Onaya, HR Park, YC Jung, DN Le, M Lee, H Hernandez-Arriaga, ...
ACS Applied Electronic Materials 5 (9), 4726-4745, 2023
12023
Atomic layer deposition and its derivatives for extreme ultraviolet (EUV) photoresist applications
DN Le, T Park, SM Hwang, JH Kim, YC Jung, N Tiwale, A Subramanian, ...
Japanese Journal of Applied Physics 62 (SG), SG0812, 2023
12023
Strategy for Low Temperature HZO Ferroelectric Capacitors for Back-End of Line Applications
JH Kim, M Lee, S Lee, YC Jung, R Chor, HJ Kim, SJ Kim, J Kim
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3, 2023
12023
(Digital Presentation) Evaluation of the O3 and H2o Oxidants in Downscaling Eot of Ferroelectric Hf0.5Zr0.5O2 on Silicon
H Hernandez-Arriaga, J Mohan, YC Jung, JH Kim, CH Rho, R Choi, J Kim
Electrochemical Society Meeting Abstracts 241, 1074-1074, 2022
12022
Effect of strontium doping on indium zinc oxide thin film transistors fabricated by low-temperature solution process
JH Kim, MC Nguyen, AHT Nguyen, SW Kim, SJ Choi, JG Cheon, HM Ji, ...
Journal of Vacuum Science & Technology B 37 (3), 2019
12019
Trap Profiling an In-Ga-Zn-O Thin Film Transistor by Using a Transmission Line Model Incorporating the Conductance Method
MC Nguyen, AHT Nguyen, H Ji, S Choi, J Cheon, KM Yu, SY Cho, JH Kim, ...
Journal of the Korean Physical Society 73, 612-615, 2018
12018
In-Situ Reflectance Absorption Infra-Red Spectroscopy (RAIRS) Study on ALD of HfO2 on TiN and Pt Electrodes
J Kim, JH Kim, M Lee, D Le, YE Hong, S Song, SJ Kim, R Choi
Electrochemical Society Meeting Abstracts 244, 1440-1440, 2023
2023
The system can't perform the operation now. Try again later.
Articles 1–20