| Gallium nitride as an electromechanical material M Rais-Zadeh, VJ Gokhale, A Ansari, M Faucher, D Théron, Y Cordier, ... Journal of Microelectromechanical Systems 23 (6), 1252-1271, 2014 | 211 | 2014 |
| Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film I Roch, P Bidaud, D Collard, L Buchaillot Journal of Micromechanics and Microengineering 13 (2), 330, 2003 | 211 | 2003 |
| Silicon nitride thin films Young's modulus determination by an optical non destructive method L Buchaillot, E Farnault, MH Fujita Japanese journal of applied physics 36 (6B), L794, 1997 | 167 | 1997 |
| Electrostatic actuated micro gripper using an amplification mechanism O Millet, P Bernardoni, S Régnier, P Bidaud, E Tsitsiris, D Collard, ... Sensors and Actuators A: Physical 114 (2-3), 371-378, 2004 | 131 | 2004 |
| Modeling the melting enthalpy of nanomaterials G Guisbiers, L Buchaillot The Journal of Physical Chemistry C 113 (9), 3566-3568, 2009 | 85 | 2009 |
| Universal size/shape-dependent law for characteristic temperatures G Guisbiers, L Buchaillot Physics Letters A 374 (2), 305-308, 2009 | 83 | 2009 |
| Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm M Gaudet, JC Camart, L Buchaillot, S Arscott Applied Physics Letters 88 (2), 024107, 2006 | 77 | 2006 |
| The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions AS Rollier, B Legrand, D Collard, L Buchaillot Journal of Micromechanics and microengineering 16 (4), 794, 2006 | 76 | 2006 |
| In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives C Durand, F Casset, P Renaux, N AbelÉAbele, B Legrand, D Renaud, ... IEEE Electron device letters 29 (5), 494-496, 2008 | 62 | 2008 |
| Size and shape effects on creep and diffusion at the nanoscale G Guisbiers, L Buchaillot Nanotechnology 19 (43), 435701, 2008 | 59 | 2008 |
| Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling P Basset, A Kaiser, B Legrand, D Collard, L Buchaillot IEEE/ASME Transactions on Mechatronics 12 (1), 23-31, 2007 | 53 | 2007 |
| Amplified piezoelectric transduction of nanoscale motion in gallium nitride electromechanical resonators M Faucher, B Grimbert, Y Cordier, N Baron, A Wilk, H Lahreche, P Bove, ... Applied Physics Letters 94 (23), 233506, 2009 | 51 | 2009 |
| CVD growth of carbon nanotubes at very low pressure of acetylene YA Kasumov, A Shailos, II Khodos, VT Volkov, VI Levashov, VN Matveev, ... Applied Physics A 88, 687-691, 2007 | 51 | 2007 |
| A three-dimensional shape memory alloy loop actuator Y Nakamura, S Nakamura, L Buchaillot, H Fujita Proceedings IEEE The Tenth Annual International Workshop on Micro Electro …, 1997 | 45 | 1997 |
| Sputtered titanium carbide thick film for high areal energy on chip carbon‐based micro‐supercapacitors M Létiche, K Brousse, A Demortière, P Huang, B Daffos, S Pinaud, ... Advanced Functional Materials 27 (20), 1606813, 2017 | 42 | 2017 |
| Post-buckling dynamic behavior of self-assembled 3D microstructures L Buchaillot, O Millet, E Quévy, D Collard Microsystem technologies 14, 69-78, 2008 | 41 | 2008 |
| Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays M Ataka, B Legrand, L Buchaillot, D Collard, H Fujita IEEE/ASME Transactions on Mechatronics 14 (1), 119-125, 2009 | 40 | 2009 |
| Fracture toughness, hardness, and Young’s modulus of tantalum nanocrystalline films G Guisbiers, E Herth, L Buchaillot, T Pardoen Applied Physics Letters 97 (14), 143115, 2010 | 39 | 2010 |
| Ultra-sensitive capacitive detection based on SGMOSFET compatible with front-end CMOS process E Colinet, C Durand, L Duraffourg, P Audebert, G Dumas, F Casset, ... IEEE Journal of Solid-State Circuits 44 (1), 247-257, 2008 | 38 | 2008 |
| Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction D Galayko, A Kaiser, L Buchaillot, B Legrand, D Collard, C Combi Journal of Micromechanics and Microengineering 13 (1), 134, 2002 | 38 | 2002 |
Bernard LegrandChercheur CNRS (LAAS / MNBT / MEMS)Verified email at laas.fr
